发明授权
US08937345B2 Integrated circuits comprising an active transistor electrically connected to a trench capacitor by an overlying contact 有权
集成电路包括通过上覆触点与沟槽电容器电连接的有源晶体管

Integrated circuits comprising an active transistor electrically connected to a trench capacitor by an overlying contact
摘要:
An integrated circuit includes an active transistor laterally adjacent to a trench capacitor formed in a semiconductor substrate, the active transistor comprising a source junction and a drain junction, wherein a barrier layer is disposed along a periphery of the trench capacitor for isolating the trench capacitor; a passive transistor laterally spaced from the active transistor, wherein at least a portion of the trench capacitor is interposed between the active and passive transistors; an interlevel dielectric disposed upon the active and passive transistors; and a first conductive contact extending through the interlevel dielectric to the drain junction of the active transistor and the at least a portion of the trench capacitor between the active and passive transistors, wherein the first conductive contact electrically connects the trench capacitor to the drain junction of the active transistor.
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