Invention Grant
- Patent Title: Vapor deposition apparatus and vapor deposition method
- Patent Title (中): 蒸镀装置及气相沉积法
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Application No.: US13530924Application Date: 2012-06-22
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Publication No.: US08940368B2Publication Date: 2015-01-27
- Inventor: Choel-Min Jang , Myung-Soo Huh , Jeong-Ho Yi , Cheol-Rae Jo , Sang-Joon Seo , Seung-Hun Kim , Jin-Kwang Kim
- Applicant: Choel-Min Jang , Myung-Soo Huh , Jeong-Ho Yi , Cheol-Rae Jo , Sang-Joon Seo , Seung-Hun Kim , Jin-Kwang Kim
- Applicant Address: KR Giheung-Gu, Yongin, Gyeonggi-Do
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Giheung-Gu, Yongin, Gyeonggi-Do
- Agent Robert E. Bushnell, Esq.
- Priority: KR10-2012-0006409 20120119
- Main IPC: C23C16/458
- IPC: C23C16/458 ; C23C16/455

Abstract:
A vapor deposition apparatus includes a stage on which a substrate is mounted; a heater unit that is disposed at a side of the stage and includes a first heater and a second heater, wherein the first heater and the second heater are movable so that the first heater and the second heater are spaced apart from each other or are disposed adjacent to each other; and a nozzle unit that is disposed at a side opposite to the side at which the heater unit is disposed about the stage and includes one or more nozzles.
Public/Granted literature
- US20130189433A1 Vapor Deposition Apparatus and Vapor Deposition Method Public/Granted day:2013-07-25
Information query
IPC分类: