Invention Grant
US08940368B2 Vapor deposition apparatus and vapor deposition method 有权
蒸镀装置及气相沉积法

Vapor deposition apparatus and vapor deposition method
Abstract:
A vapor deposition apparatus includes a stage on which a substrate is mounted; a heater unit that is disposed at a side of the stage and includes a first heater and a second heater, wherein the first heater and the second heater are movable so that the first heater and the second heater are spaced apart from each other or are disposed adjacent to each other; and a nozzle unit that is disposed at a side opposite to the side at which the heater unit is disposed about the stage and includes one or more nozzles.
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