Invention Grant
- Patent Title: Insulative elements
- Patent Title (中): 绝缘元素
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Application No.: US13038605Application Date: 2011-03-02
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Publication No.: US08940388B2Publication Date: 2015-01-27
- Inventor: Vassil Antonov , Jennifer K. Sigman , Vishwanath Bhat , Matthew N. Rocklein , Bhaskar Srinivasan , Chris Carlson
- Applicant: Vassil Antonov , Jennifer K. Sigman , Vishwanath Bhat , Matthew N. Rocklein , Bhaskar Srinivasan , Chris Carlson
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: TraskBritt
- Main IPC: B32B7/02
- IPC: B32B7/02 ; H01G4/33 ; H01G4/30 ; H01G4/12

Abstract:
Methods of forming an insulative element are described, including forming a first metal oxide material having a first dielectric constant, forming a second metal oxide material having a second dielectric constant different from the first, and heating at least portions of the structure to crystallize at least a portion of at least one of the first dielectric material and the second dielectric material. Methods of forming a capacitor are described, including forming a first electrode, forming a dielectric material with a first oxide and a second oxide over the first electrode, and forming a second electrode over the dielectric material. Structures including dielectric materials are also described.
Public/Granted literature
- US20120225268A1 INSULATIVE ELEMENTS AND METHODS OF FORMING THE SAME Public/Granted day:2012-09-06
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