发明授权
US08941214B2 Semiconductor device having a necked semiconductor body and method of forming semiconductor bodies of varying width
有权
具有颈缩半导体本体的半导体器件和形成宽度不同的半导体器件的方法
- 专利标题: Semiconductor device having a necked semiconductor body and method of forming semiconductor bodies of varying width
- 专利标题(中): 具有颈缩半导体本体的半导体器件和形成宽度不同的半导体器件的方法
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申请号: US13995634申请日: 2011-12-22
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公开(公告)号: US08941214B2公开(公告)日: 2015-01-27
- 发明人: Bernhard Sell
- 申请人: Bernhard Sell
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Blakely, Sokoloff, Taylor & Zafman LLP
- 国际申请: PCT/US2011/066991 WO 20111222
- 国际公布: WO2013/095550 WO 20130627
- 主分类号: H01L29/06
- IPC分类号: H01L29/06 ; H01L21/02 ; H01L29/66 ; H01L29/78
摘要:
Semiconductor devices having necked semiconductor bodies and methods of forming semiconductor bodies of varying width are described. For example, a semiconductor device includes a semiconductor body disposed above a substrate. A gate electrode stack is disposed over a portion of the semiconductor body to define a channel region in the semiconductor body under the gate electrode stack. Source and drain regions are defined in the semiconductor body on either side of the gate electrode stack. Sidewall spacers are disposed adjacent to the gate electrode stack and over only a portion of the source and drain regions. The portion of the source and drain regions under the sidewall spacers has a height and a width greater than a height and a width of the channel region of the semiconductor body.
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