发明授权
- 专利标题： Method of producing optical element and optical element
- 专利标题（中）： 制造光学元件和光学元件的方法
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申请号： US13055663申请日： 2009-07-07
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公开(公告)号： US08941920B2公开(公告)日： 2015-01-27
- 发明人: Kazuhiro Arai , Jun-ichi Sakamoto , Junji Terada , Noriyuki Nakai
- 申请人： Kazuhiro Arai , Jun-ichi Sakamoto , Junji Terada , Noriyuki Nakai
- 申请人地址： JP Tokyo
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： JP Tokyo
- 代理机构： Canon USA Inc. IP Division
- 优先权： JP2008-193696 20080728; JP2009-155669 20090630; JP2009-167908 20090716
- 国际申请： PCT/JP2009/063704 WO 20090707
- 国际公布： WO2010/013821 WO 20100204
- 主分类号： G02B5/30
- IPC分类号： G02B5/30 ; G02B5/18 ; G02B27/28
摘要：
Provided are an optical element and a method of producing an optical element in which sufficient adhesion with an upper layer can be secured without damaging spectral characteristics. The production method includes the step of forming a first structural body in which a space part and a structural part are alternately and repeatedly arranged, the step of forming an etching stopper layer on an upper part of the structural part, and the step of forming a second structural body on the etching stopper layer by etching.
公开/授权文献
- US20110123765A1 METHOD OF PRODUCING OPTICAL ELEMENT AND OPTICAL ELEMENT 公开/授权日：2011-05-26
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