发明授权
- 专利标题： Transfer chamber with vacuum extension for shutter disks
- 专利标题（中）： 传送室，带快门盘的真空扩展
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申请号： US13589631申请日： 2012-08-20
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公开(公告)号： US08945308B2公开(公告)日： 2015-02-03
- 发明人: Jason Schaller
- 申请人： Jason Schaller
- 申请人地址： US CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Patterson & Sheridan, LLP
- 主分类号： C23C14/34
- IPC分类号： C23C14/34 ; C23C14/56 ; H01L21/67 ; H01L21/677
摘要：
The present invention relates to a cluster tool for processing semiconductor substrates. One embodiment of the present invention provides a mainframe for a cluster tool comprising a transfer chamber having a substrate transferring robot disposed therein. The substrate transferring robot is configured to shuttle substrates among one or more processing chambers directly or indirectly connected to the transfer chamber. The mainframe further comprises a shutter disk shelf configured to store one or more shutter disks to be used by the one or more processing chambers, wherein the shutter disk shelf is accessible to the substrate transferring robot so that the substrate transferring robot can transfer the one or more shutter disks between the shutter disk shelf and the one or more processing chambers directly or indirectly connected to the transfer chamber.
公开/授权文献
- US20120325140A1 TRANSFER CHAMBER WITH VACUUM EXTENSION FOR SHUTTER DISKS 公开/授权日：2012-12-27
信息查询
IPC分类:
