Invention Grant
- Patent Title: Micromechanical angular acceleration sensor and method for measuring an angular acceleration
- Patent Title (中): 微机械角加速度传感器和角加速度测量方法
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Application No.: US13479746Application Date: 2012-05-24
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Publication No.: US08950258B2Publication Date: 2015-02-10
- Inventor: Reinhard Neul , Torsten Ohms , Mirko Hattass , Daniel Christoph Meisel
- Applicant: Reinhard Neul , Torsten Ohms , Mirko Hattass , Daniel Christoph Meisel
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Maginot, Moore & Beck LLP
- Priority: DE102011076393 20110524
- Main IPC: G01P15/10
- IPC: G01P15/10 ; G01P15/12 ; G01P15/09 ; H01L41/113

Abstract:
A micromechanical angular acceleration sensor for measuring an angular acceleration is disclosed. The sensor includes a substrate, a seismic mass, at least one suspension, which fixes the seismic mass to the substrate in a deflectable manner, and at least one piezoresistive and/or piezoelectric element for measuring the angular acceleration. The piezoresistive and/or piezoelectric element is arranged in a cutout of the seismic mass. A corresponding method and uses of the sensor are also disclosed.
Public/Granted literature
- US20120297878A1 Micromechanical Angular Acceleration Sensor and Method for Measuring an Angular Acceleration Public/Granted day:2012-11-29
Information query
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