Invention Grant
US08950258B2 Micromechanical angular acceleration sensor and method for measuring an angular acceleration 有权
微机械角加速度传感器和角加速度测量方法

Micromechanical angular acceleration sensor and method for measuring an angular acceleration
Abstract:
A micromechanical angular acceleration sensor for measuring an angular acceleration is disclosed. The sensor includes a substrate, a seismic mass, at least one suspension, which fixes the seismic mass to the substrate in a deflectable manner, and at least one piezoresistive and/or piezoelectric element for measuring the angular acceleration. The piezoresistive and/or piezoelectric element is arranged in a cutout of the seismic mass. A corresponding method and uses of the sensor are also disclosed.
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