Invention Grant
- Patent Title: Method for producing a protective structure
- Patent Title (中): 保护结构的制造方法
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Application No.: US14260301Application Date: 2014-04-24
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Publication No.: US08951879B2Publication Date: 2015-02-10
- Inventor: Andre Schmenn , Damian Sojka , Carsten Ahrens
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Priority: DE102007024355 20070524
- Main IPC: H01L21/331
- IPC: H01L21/331 ; H01L29/66 ; H01L21/265 ; H01L21/22

Abstract:
A method for producing a protective structure may include: providing a semiconductor base substrate with a doping of a first conductivity type; producing a first epitaxial layer on the substrate; implanting a dopant of a second conductivity type in a delimited implantation region of the first epitaxial layer; applying a second epitaxial layer with a doping of the second conductivity type on the first epitaxial layer; forming an insulation zone in the second epitaxial layer, such that the second epitaxial layer is subdivided into first and second regions; producing a first dopant zone with a doping of the first conductivity type in the first region above the implantation region; producing a second dopant zone with a doping of the second conductivity type in the second region; outdiffusing the dopant from the implantation region to form a buried layer at the junction between the first epitaxial layer and the first region.
Public/Granted literature
- US20140235039A1 METHOD FOR PRODUCING A PROTECTIVE STRUCTURE Public/Granted day:2014-08-21
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