Invention Grant
US08952484B2 Non-volatile memory having isolation structures in and above a substrate and manufacturing method thereof
有权
在基板中和上方具有隔离结构的非易失性存储器及其制造方法
- Patent Title: Non-volatile memory having isolation structures in and above a substrate and manufacturing method thereof
- Patent Title (中): 在基板中和上方具有隔离结构的非易失性存储器及其制造方法
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Application No.: US12949092Application Date: 2010-11-18
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Publication No.: US08952484B2Publication Date: 2015-02-10
- Inventor: Guan-Wei Wu , I-Chen Yang , Yao-Wen Chang , Tao-Cheng Lu
- Applicant: Guan-Wei Wu , I-Chen Yang , Yao-Wen Chang , Tao-Cheng Lu
- Applicant Address: TW Hsinchu
- Assignee: MACRONIX International Co., Ltd.
- Current Assignee: MACRONIX International Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: J.C. Patents
- Main IPC: H01L21/70
- IPC: H01L21/70 ; H01L29/788 ; H01L29/792 ; H01L21/8238 ; H01L21/336 ; H01L21/762

Abstract:
A non-volatile memory and a manufacturing method thereof are provided. The non-volatile memory includes a substrate, a gate structure, a first doped region, a second doped region and a pair of isolation structures. The gate structure is disposed on the substrate. The gate structure includes a charge storage structure, a gate and spacers. The charge storage structure is disposed on the substrate. The gate is disposed on the charge storage structure. The spacers are disposed on the sidewalls of the gate and the charge storage structure. The first doped region and the second doped region are respectively disposed in the substrate at two sides of the charge storage structure and at least located under the spacers. The isolation structures are respectively disposed in the substrate at two sides of the gate structure.
Public/Granted literature
- US20120126307A1 NON-VOLATILE MEMORY AND MANUFACTURING METHOD THEREOF Public/Granted day:2012-05-24
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