Invention Grant
- Patent Title: White-light interferometric measuring device
- Patent Title (中): 白光干涉测量装置
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Application No.: US13782084Application Date: 2013-03-01
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Publication No.: US08953170B2Publication Date: 2015-02-10
- Inventor: Atsushi Usami , Tatsuya Nagahama
- Applicant: Mitutoyo Corporation
- Applicant Address: JP Kanagawa
- Assignee: Mitutoyo Corporation
- Current Assignee: Mitutoyo Corporation
- Current Assignee Address: JP Kanagawa
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JP2012-059993 20120316
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01B9/04

Abstract:
A white-light interferometric measuring device includes: a white light source that emits a white light beam; a beam splitter that reflects the white light beam; and an interference objective lens that collects the white light beam having reflected off the beam splitter in the direction of an optical axis and irradiates a measurement workpiece with the white light beam, the interference objective lens generating interference between a measurement light beam obtained by reflection of the white light beam off the measurement workpiece and a reference light beam obtained by branching of the white light beam to be converged on the measurement workpiece. Polarization correcting means that corrects the white light beam to enter the interference objective lens to circularly polarized light is arranged between the white light source and the interference objective lens.
Public/Granted literature
- US20130242311A1 WHITE-LIGHT INTERFEROMETRIC MEASURING DEVICE Public/Granted day:2013-09-19
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