Invention Grant
- Patent Title: Methods of generating circuit layouts that are to be manufactured using SADP routing techniques and virtual non-mandrel mask rules
- Patent Title (中): 使用SADP路由技术和虚拟非心轴掩码规则生成电路布局的方法
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Application No.: US14043251Application Date: 2013-10-01
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Publication No.: US08954913B1Publication Date: 2015-02-10
- Inventor: Lei Yuan , Soo Han Choi , Jongwook Kye , Harry J. Levinson
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: G06F17/50
- IPC: G06F17/50

Abstract:
One method disclosed herein involves, among other things, generating a set of mandrel mask rules, block mask rules and a virtual, software-based non-mandrel-metal mask. The method also includes creating a set of virtual non-mandrel mask rules that is a replica of the mandrel mask rules, generating a set of metal routing design rules based upon the mandrel mask rules, the block mask rules and the virtual non-mandrel mask rules, generating the circuit routing layout based upon the metal routing design rules, decomposing the circuit routing layout into a mandrel mask pattern and a block mask pattern, generating a first set of mask data corresponding to the mandrel mask pattern, and generating a second set of mask data corresponding to the block mask pattern.
Information query