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US08956945B2 Trench isolation for bipolar junction transistors in BiCMOS technology 有权
BiCMOS技术中双极结晶体管的沟槽隔离

Trench isolation for bipolar junction transistors in BiCMOS technology
Abstract:
Device structures, fabrication methods, and design structures for a bipolar junction transistor. A first isolation structure is formed in a substrate to define a boundary for a device region. A collector is formed in the device region, and a second isolation structure is formed in the device region. The second isolation structure defines a boundary for the collector. The second isolation structure is laterally positioned relative to the first isolation structure to define a section of the device region between the first and second isolation structures.
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