Invention Grant
- Patent Title: High-voltage integrated metal capacitor and fabrication method
- Patent Title (中): 高压集成金属电容器及其制造方法
-
Application No.: US13648882Application Date: 2012-10-10
-
Publication No.: US08957500B2Publication Date: 2015-02-17
- Inventor: Jerôme Guillaume Anna Dubois , Piet Wessels
- Applicant: NXP B.V.
- Applicant Address: NL Eindhoven
- Assignee: NXP B.V.
- Current Assignee: NXP B.V.
- Current Assignee Address: NL Eindhoven
- Main IPC: H01L27/02
- IPC: H01L27/02

Abstract:
A high-voltage metal capacitor with easy integration into existing semiconductor manufacturing processes can provide isolation capacitors up to several kilovolts. The capacitor includes a support layer with internal structure, including a lower place, a bond pad on the support layer, an upper plate disposed on the support layer, the upper plate being arranged above the lower plate, a dielectric layer, at least part of which is between the lower and upper plates, and a passivation layer, at least part of which covers at least part of the upper plate and part of the dielectric layer. A first opening extends from the surface through the passivation and dielectric layers to the lower plate, and a second opening extends from the surface through the passivation layer to the upper plate. A method of manufacturing the capacitor.
Public/Granted literature
- US20140097516A1 HIGH-VOLTAGE INTEGRATED METAL CAPACITOR AND FABRICATION METHOD Public/Granted day:2014-04-10
Information query
IPC分类: