Invention Grant
US08957500B2 High-voltage integrated metal capacitor and fabrication method 有权
高压集成金属电容器及其制造方法

  • Patent Title: High-voltage integrated metal capacitor and fabrication method
  • Patent Title (中): 高压集成金属电容器及其制造方法
  • Application No.: US13648882
    Application Date: 2012-10-10
  • Publication No.: US08957500B2
    Publication Date: 2015-02-17
  • Inventor: Jerôme Guillaume Anna DuboisPiet Wessels
  • Applicant: NXP B.V.
  • Applicant Address: NL Eindhoven
  • Assignee: NXP B.V.
  • Current Assignee: NXP B.V.
  • Current Assignee Address: NL Eindhoven
  • Main IPC: H01L27/02
  • IPC: H01L27/02
High-voltage integrated metal capacitor and fabrication method
Abstract:
A high-voltage metal capacitor with easy integration into existing semiconductor manufacturing processes can provide isolation capacitors up to several kilovolts. The capacitor includes a support layer with internal structure, including a lower place, a bond pad on the support layer, an upper plate disposed on the support layer, the upper plate being arranged above the lower plate, a dielectric layer, at least part of which is between the lower and upper plates, and a passivation layer, at least part of which covers at least part of the upper plate and part of the dielectric layer. A first opening extends from the surface through the passivation and dielectric layers to the lower plate, and a second opening extends from the surface through the passivation layer to the upper plate. A method of manufacturing the capacitor.
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