Invention Grant
US08957526B2 Semiconductor chips having through silicon vias and related fabrication methods and semiconductor packages 有权
具有硅通孔和相关制造方法的半导体芯片以及半导体封装

Semiconductor chips having through silicon vias and related fabrication methods and semiconductor packages
Abstract:
A semiconductor chip including through silicon vias (TSVs), wherein the TSVs may be prevented from bending and the method of fabricating the semiconductor chip may be simplified, and a method of fabricating the semiconductor chip. The semiconductor chip includes a silicon substrate having a first surface and a second surface; a plurality of TSVs which penetrate the silicon substrate and protrude above the second surface of the silicon substrate; a polymer pattern layer which is formed on the second surface of the silicon substrate, surrounds side surfaces of the protruding portion of each of the TSVs, and comprises a flat first portion and a second portion protruding above the first portion; and a plated pad which is formed on the polymer pattern layer and covers a portion of each of the TSVs exposed from the polymer pattern layer.
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