Invention Grant
- Patent Title: Semiconductor chips having through silicon vias and related fabrication methods and semiconductor packages
- Patent Title (中): 具有硅通孔和相关制造方法的半导体芯片以及半导体封装
-
Application No.: US13733923Application Date: 2013-01-04
-
Publication No.: US08957526B2Publication Date: 2015-02-17
- Inventor: Jin-ho Chun , Byung-lyul Park , Hyun-soo Chung , Gil-heyun Choi , Son-kwan Hwang
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel Sibley & Sajovec, P.A.
- Priority: KR10-2012-0036798 20120409
- Main IPC: H01L23/52
- IPC: H01L23/52 ; H01L29/24 ; H01L23/48 ; H01L21/768 ; H01L25/065 ; H01L23/31

Abstract:
A semiconductor chip including through silicon vias (TSVs), wherein the TSVs may be prevented from bending and the method of fabricating the semiconductor chip may be simplified, and a method of fabricating the semiconductor chip. The semiconductor chip includes a silicon substrate having a first surface and a second surface; a plurality of TSVs which penetrate the silicon substrate and protrude above the second surface of the silicon substrate; a polymer pattern layer which is formed on the second surface of the silicon substrate, surrounds side surfaces of the protruding portion of each of the TSVs, and comprises a flat first portion and a second portion protruding above the first portion; and a plated pad which is formed on the polymer pattern layer and covers a portion of each of the TSVs exposed from the polymer pattern layer.
Public/Granted literature
Information query
IPC分类: