发明授权
- 专利标题： Controlled surface roughness in vacuum retention
- 专利标题（中）： 真空保持中的受控表面粗糙度
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申请号： US13250871申请日： 2011-09-30
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公开(公告)号： US08960686B2公开(公告)日： 2015-02-24
- 发明人: Robert A. Ferguson
- 申请人： Robert A. Ferguson
- 申请人地址： US OR Portland
- 专利权人： Electro Scientific Industries, Inc.
- 当前专利权人： Electro Scientific Industries, Inc.
- 当前专利权人地址： US OR Portland
- 代理机构： Young Basile Hanlon & MacFarlane P.C.
- 主分类号： H01L21/683
- IPC分类号： H01L21/683 ; B23Q3/08
摘要：
An apparatus, particularly a chuck for retaining a thin part for micro-machining processing, is disclosed. The chuck is formed of a plate-shaped body having a first surface and a second surface opposite the first surface. The plate-shaped body includes a light-transmissive material, and at least one of the first surface or the second surface is a roughened surface. The chuck can be incorporated into a micro-machining system using a chuck support that allows light through to backlight a processed part for inspection.
公开/授权文献
- US20130082448A1 Controlled Surface Roughness in Vacuum Retention 公开/授权日：2013-04-04
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