Invention Grant
- Patent Title: Method of making a reflective shield
- Patent Title (中): 制作反光罩的方法
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Application No.: US14106977Application Date: 2013-12-16
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Publication No.: US08962375B2Publication Date: 2015-02-24
- Inventor: Yu-Hao Shih , Szu-Ying Chen , Hsing-Lung Chen , Jen-Cheng Liu , Dun-Nian Yaung , Volume Chien
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW
- Agency: Lowe Hauptman & Ham, LLP
- Main IPC: H01L31/0232
- IPC: H01L31/0232 ; H01L27/146 ; H01L31/18

Abstract:
A method of creating a reflective shield for an image sensor device includes depositing a first dielectric layer on a substrate, wherein a photodiode is on the substrate. The method further includes removing surface topography by performing chemical mechanical polishing (CMP) on the first dielectric layer. The method further includes patterning the substrate to define an area on a surface of the first dielectric layer, wherein the area is directly above the photodiode. The method further includes depositing a layer of a material with high reflectivity on the substrate, wherein the material fills the area on the surface of the first dielectric layer. The method further includes removing excess material with high reflectivity, wherein the reflective shield is formed and is embedded in the first dielectric layer. The method further includes depositing a second dielectric material on the substrate, wherein the second dielectric material covers the reflective shield.
Public/Granted literature
- US20140106498A1 METHOD OF MAKING A REFLECTIVE SHIELD Public/Granted day:2014-04-17
Information query
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