发明授权
- 专利标题: Memory cells having heaters with angled sidewalls
- 专利标题(中): 存储单元具有带有倾斜侧壁的加热器
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申请号: US13354966申请日: 2012-01-20
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公开(公告)号: US08962384B2公开(公告)日: 2015-02-24
- 发明人: Andrea Redaelli , Giorgio Servalli , Pietro Petruzza , Cinzia Perrone
- 申请人: Andrea Redaelli , Giorgio Servalli , Pietro Petruzza , Cinzia Perrone
- 申请人地址: US ID Boise
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 当前专利权人地址: US ID Boise
- 代理机构: Brooks, Cameron & Huebsch, PLLC
- 主分类号: H01L21/06
- IPC分类号: H01L21/06 ; H01L45/00
摘要:
Memory cells having heaters with angled sidewalls and methods of forming the same are described herein. As an example, a method of forming an array of resistive memory cells can include forming a first resistive memory cell having a first heater element angled with respect to a vertical plane, forming a second resistive memory cell adjacent to the first resistive memory cell and having a second heater element angled with respect to the vertical plane and toward the first heater, and forming a third resistive memory cell adjacent to the first resistive memory cell and having a third heater element angled with respect to the vertical plane and away from the first heater element.
公开/授权文献
- US20130187120A1 MEMORY CELLS HAVING HEATERS WITH ANGLED SIDEWALLS 公开/授权日:2013-07-25
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