Invention Grant
- Patent Title: Semiconductor device and method of manufacturing the same
- Patent Title (中): 半导体装置及其制造方法
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Application No.: US14026369Application Date: 2013-09-13
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Publication No.: US08963161B2Publication Date: 2015-02-24
- Inventor: Satoshi Murakami , Yosuke Tsukamoto , Tomoaki Atsumi , Masayuki Sakakura
- Applicant: Semiconductor Energy Laboratory Co., Ltd.
- Applicant Address: JP Atsugi-shi, Kanagawa-ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Atsugi-shi, Kanagawa-ken
- Agency: Fish & Richardson P.C.
- Priority: JP2000-370873 20001206
- Main IPC: H01L27/00
- IPC: H01L27/00 ; H01L29/04 ; H01L27/12 ; G02F1/1345 ; G02F1/1362

Abstract:
In a semiconductor device, gate signal lines are spaced apart from each other above a crystalline semiconductor film. Therefore a first protective circuit is not electrically connected when contact holes are opened in an interlayer insulating film. The static electricity generated during dry etching for opening the contact holes moves from the gate signal line, damages a gate insulating film, passes the crystalline semiconductor film, and again damages the gate insulating film before it reaches the gate signal line. As the static electricity generated during the dry etching damages the first protective circuit, the energy of the static electricity is reduced until it loses the capacity of damaging a driving circuit TFT. The driving circuit TFT is thus prevented from suffering electrostatic discharge damage.
Public/Granted literature
- US20140014964A1 Semiconductor Device and Method of Manufacturing the Same Public/Granted day:2014-01-16
Information query
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