Invention Grant
- Patent Title: Semiconductor structure including a semiconductor-on-insulator region and a bulk region, and method for the formation thereof
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Application No.: US13678054Application Date: 2012-11-15
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Publication No.: US08963208B2Publication Date: 2015-02-24
- Inventor: Stefan Flachowsky , Matthias Kessler , Jan Hoentschel
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES, Inc.
- Current Assignee: GLOBALFOUNDRIES, Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/02 ; H01L21/8238 ; H01L21/84 ; H01L21/762 ; H01L29/66 ; H01L27/12 ; H01L27/06 ; H01L29/94 ; H01L27/088

Abstract:
A structure comprises a semiconductor substrate, a semiconductor-on-insulator region and a bulk region. The semiconductor-on-insulator region comprises a first semiconductor region, a dielectric layer provided between the semiconductor substrate and the first semiconductor region, and a first transistor comprising an active region provided in the first semiconductor region. The dielectric layer provides electrical isolation between the first semiconductor region and the semiconductor substrate. The bulk region comprises a second semiconductor region provided directly on the semiconductor substrate.
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