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US08963216B2 Chemical sensor with sidewall spacer sensor surface 有权
化学传感器与侧壁间隔传感器表面

Chemical sensor with sidewall spacer sensor surface
Abstract:
In one implementation, a chemical sensor is described. The chemical sensor includes chemically-sensitive field effect transistor including a floating gate conductor having an upper surface. A dielectric material defines an opening extending to the upper surface of the floating gate conductor. A conductive sidewall spacer is on a sidewall of the opening and contacts the upper surface of the floating gate conductor.
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