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    Methods for manufacturing well structures for low-noise chemical sensors
    3.
    发明授权
    Methods for manufacturing well structures for low-noise chemical sensors 有权

    公开(公告)号：US09841398B2

    公开(公告)日：2017-12-12

    申请号：US13736566

    申请日：2013-01-08

    Applicant: LIFE TECHNOLOGIES CORPORATION

    Inventor： James Bustillo ,  Shifeng Li

    IPC: H01L29/66 ,  G01N27/414

    CPC classification number: G01N27/414 ,  G01N27/4145 ,  G01N27/4148

    Abstract: In one implementation, a method for manufacturing a chemical detection device is described. The method includes forming a chemical sensor having a sensing surface. A dielectric material is deposited on the sensing surface. A first etch process is performed to partially etch the dielectric material to define an opening over the sensing surface and leave remaining dielectric material on the sensing surface. An etch protect material is formed on a sidewall of the opening. A second etch process is then performed to selectively etch the remaining dielectric material using the etch protect material as an etch mask, thereby exposing the sensing surface.

    Chemical sensors with consistent sensor surface areas
    7.
    发明授权
    Chemical sensors with consistent sensor surface areas 有权
    化学传感器具有一致的传感器表面积

    公开(公告)号：US09128044B2

    公开(公告)日：2015-09-08

    申请号：US14198382

    申请日：2014-03-05

    Applicant: LIFE TECHNOLOGIES CORPORATION

    Inventor： Keith G. Fife ,  Jordan Owens ,  Shifeng Li ,  James Bustillo

    IPC: G01N27/414 ,  B01L3/00

    CPC classification number: G01N27/414 ,  B01L3/502761 ,  B01L2200/0668 ,  B01L2300/0636 ,  B01L2300/0877 ,  G01N27/4145 ,  G01N27/4148

    Abstract: In one embodiment, a chemical sensor is described. The chemical sensor includes a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface. A material defines an opening extending to the upper surface of the floating gate conductor. The material comprises a first dielectric underlying a second dielectric. A conductive element contacts the upper surface of the floating gate conductor and extends a distance along a sidewall of the opening, the distance defined by a thickness of the first dielectric.

    Abstract translation: 在一个实施例中，描述了化学传感器。 化学传感器包括具有上表面的浮栅导体的化学敏感场效应晶体管。 材料限定了延伸到浮动栅极导体的上表面的开口。 该材料包括位于第二电介质下面的第一电介质。 导电元件接触浮动栅极导体的上表面并且沿着开口的侧壁延伸一定距离，该距离由第一电介质的厚度限定。

    Chemical sensor with sidewall sensor surface
    8.
    发明授权
    Chemical sensor with sidewall sensor surface 有权
    具有侧壁传感器表面的化学传感器

    公开(公告)号：US09116117B2

    公开(公告)日：2015-08-25

    申请号：US14197710

    申请日：2014-03-05

    Applicant: LIFE TECHNOLOGIES CORPORATION

    Inventor： Keith G. Fife ,  Jordan Owens ,  Shifeng Li ,  James Bustillo

    IPC: G01N27/414

    CPC classification number: G01N27/4145

    Abstract: In one embodiment, a chemical sensor is described. The chemical sensor includes a chemically-sensitive field effect transistor including a floating gate conductor. A material defines an opening overlying the floating gate conductor. The material comprises a conductive element having an inner surface defining a lower portion of a sidewall of the opening. A dielectric is on the conductive element and has an inner surface defining an upper portion of the sidewall.

    Abstract translation: 在一个实施例中，描述了化学传感器。 化学传感器包括具有浮栅导体的化学敏感场效应晶体管。 材料限定了覆盖浮栅导体的开口。 该材料包括具有限定开口的侧壁的下部的内表面的导电元件。 电介质位于导电元件上，并具有限定侧壁上部的内表面。

    CHEMICAL SENSORS WITH PARTIALLY EXTENDED SENSOR SURFACES
    9.
    发明申请
    CHEMICAL SENSORS WITH PARTIALLY EXTENDED SENSOR SURFACES 审中-公开
    具有部分扩展传感器表面的化学传感器

    公开(公告)号：US20140264465A1

    公开(公告)日：2014-09-18

    申请号：US13801112

    申请日：2013-03-13

    Applicant: LIFE TECHNOLOGIES CORPORATION

    Inventor： Keith Fife ,  James Bustillo ,  Jordan Owens

    IPC: G01N27/414 ,  H01L29/788 ,  H01L29/66

    CPC classification number: H01L29/788 ,  G01N27/4145

    Abstract: In one implementation, a chemical sensor is described. The chemical sensor includes a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface. A dielectric material defines an opening extending to the upper surface of the floating gate conductor. A conductive element is on a sidewall of the opening and spaced away from an upper surface of the dielectric material, the conductive element communicating with the floating gate conductor.

    Abstract translation: 在一个实施方式中，描述了化学传感器。 化学传感器包括具有上表面的浮栅导体的化学敏感场效应晶体管。 介电材料限定了延伸到浮动栅极导体的上表面的开口。 导电元件位于开口的侧壁上并与电介质材料的上表面间隔开，导电元件与浮动栅极导体连通。

    Methods and apparatus for measuring analytes using large scale FET arrays
    10.
    发明授权
    Methods and apparatus for measuring analytes using large scale FET arrays 有权

    公开(公告)号：US12140560B2

    公开(公告)日：2024-11-12

    申请号：US17820202

    申请日：2022-08-16

    Applicant: Life Technologies Corporation

    Inventor： Jonathan Rothberg ,  Wolfgang Hinz ,  Kim Johnson ,  James Bustillo

    IPC: G01N27/414 ,  C12Q1/6818 ,  C12Q1/6874 ,  G01N33/543 ,  H01L27/088 ,  H01L29/423 ,  H01L29/78

    Abstract: Methods and apparatus relating to very large scale FET arrays for analyte measurements. ChemFET (e.g., ISFET) arrays may be fabricated using conventional CMOS processing techniques based on improved FET pixel and array designs that increase measurement sensitivity and accuracy, and at the same time facilitate significantly small pixel sizes and dense arrays. Improved array control techniques provide for rapid data acquisition from large and dense arrays. Such arrays may be employed to detect a presence and/or concentration changes of various analyte types in a wide variety of chemical and/or biological processes. In one example, chemFET arrays facilitate DNA sequencing techniques based on monitoring changes in hydrogen ion concentration (pH), changes in other analyte concentration, and/or binding events associated with chemical processes relating to DNA synthesis.

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