Invention Grant
- Patent Title: Semiconductor device having backside redistribution layers and method for fabricating the same
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Application No.: US13789305Application Date: 2013-03-07
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Publication No.: US08963292B2Publication Date: 2015-02-24
- Inventor: Steve Oliver , Warren Farnworth
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Fletcher Yoder, P.C.
- Main IPC: H01L21/44
- IPC: H01L21/44 ; H01L29/40 ; H01L23/485 ; H01L21/768 ; H01L23/00

Abstract:
Present embodiments relate to a semiconductor device having a backside redistribution layer and a method for forming such a layer. Specifically, one embodiment includes providing a substrate comprising a via formed therein. The substrate has a front side and a backside. The embodiment may further include forming a trench on the backside of the substrate, disposing an insulating material in the trench, and forming a trace over the insulating material in the trench.
Public/Granted literature
- US20130181348A1 SEMICONDUCTOR DEVICE HAVING BACKSIDE REDISTRIBUTION LAYERS AND METHOD FOR FABRICATING THE SAME Public/Granted day:2013-07-18
Information query
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