- 专利标题: Dust removing device and dust removing method
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申请号: US12945523申请日: 2010-11-12
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公开(公告)号: US08966704B2公开(公告)日: 2015-03-03
- 发明人: Toshihiro Ifuku , Tatsuo Furuta , Hiroshi Saito , Kenichi Takeda
- 申请人: Toshihiro Ifuku , Tatsuo Furuta , Hiroshi Saito , Kenichi Takeda
- 申请人地址: JP Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Fitzpatrick, Cella, Harper & Scinto
- 优先权: JP2009-269316 20091126
- 主分类号: H01L41/09
- IPC分类号: H01L41/09 ; B06B1/06 ; B08B7/02 ; H04N5/225 ; G03B17/00 ; G03B11/00 ; H04N5/217 ; G02B27/00 ; G03B17/02 ; G03B17/14
摘要:
In a piezoelectric device, a first electrode and a second electrode are disposed to be opposed to each other on plate surfaces of the piezoelectric device, a first electrode plane of the piezoelectric device is fixedly bonded to a plate surface of a vibrating plate, a piezoelectric material forming the piezoelectric device is polarized in a direction parallel to the first electrode plane, the piezoelectric device is fixed to a base through a second electrode plane of the piezoelectric device, and the piezoelectric device generates a thickness-shear vibration with the fixed second electrode plane being a reference plane. The piezoelectric vibration generated by the piezoelectric device generates a flexural vibration in the vibrating plate, to thereby remove dust adhering to a surface of the vibrating plate.
公开/授权文献
- US20110120494A1 DUST REMOVING DEVICE AND DUST REMOVING METHOD 公开/授权日:2011-05-26
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