发明授权
US08968054B2 Method for cooling a workpiece made of semiconductor material during wire sawing
有权
丝线切割时由半导体材料制成的工件的冷却方法
- 专利标题: Method for cooling a workpiece made of semiconductor material during wire sawing
- 专利标题(中): 丝线切割时由半导体材料制成的工件的冷却方法
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申请号: US13340719申请日: 2011-12-30
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公开(公告)号: US08968054B2公开(公告)日: 2015-03-03
- 发明人: Peter Wiesner , Anton Huber
- 申请人: Peter Wiesner , Anton Huber
- 申请人地址: DE Munich
- 专利权人: Siltronic AG
- 当前专利权人: Siltronic AG
- 当前专利权人地址: DE Munich
- 代理机构: Leydig, Voit & Mayer, Ltd.
- 优先权: DE102011008400 20110112
- 主分类号: B28D1/06
- IPC分类号: B28D1/06 ; B28D5/00 ; B28D1/08
摘要:
A method for cooling a cylindrical workpiece during wire sawing includes applying a liquid coolant to a surface of the workpiece. The workpiece is made of semiconductor material having a surface including two end faces and a lateral face. The method includes sawing the workpiece with a wire saw including a wire web having wire sections arranged in parallel by penetrating the wire sections into the workpiece by an oppositely directed relative movement of the wire sections and the workpiece. Wipers are disposed so as to bear on the surface of the workpiece. The temperature of the workpiece is controlled during the wire sawing using a liquid coolant applied onto the workpiece above the wipers so as to remove the liquid coolant with the wipers bearing on the workpiece surface.
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