Invention Grant
US08969932B2 Methods of forming a finfet semiconductor device with undoped fins
有权
用未掺杂的翅片形成finfet半导体器件的方法
- Patent Title: Methods of forming a finfet semiconductor device with undoped fins
- Patent Title (中): 用未掺杂的翅片形成finfet半导体器件的方法
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Application No.: US13711779Application Date: 2012-12-12
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Publication No.: US08969932B2Publication Date: 2015-03-03
- Inventor: Andy C. Wei , Akshey Sehgal , Seung Y. Kim , Teck Jung Tang , Francis M. Tambwe
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L29/66 ; H01L29/78

Abstract:
One method disclosed herein includes, prior to forming an isolation region in a semiconducting substrate for the device, forming a doped well region and a doped punch-stop region in the substrate, introducing a dopant material that is adapted to retard diffusion of boron or phosphorous into the substrate to form a dopant-containing layer proximate an upper surface of the substrate, performing an epitaxial deposition process to form an undoped semiconducting material above the dopant-containing layer, forming a plurality of spaced-apart trenches that extend at least partially into the substrate, wherein the trenches define a fin for the device comprised of at least the undoped semiconducting material, forming at least a local isolation insulating material in the trenches, and forming a gate structure around at least the undoped semiconducting material, wherein a bottom of a gate electrode is positioned approximately level with or below a bottom of the undoped semiconducting material.
Public/Granted literature
- US20140159126A1 METHODS OF FORMING A FINFET SEMICONDUCTOR DEVICE WITH UNDOPED FINS Public/Granted day:2014-06-12
Information query
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