发明授权
- 专利标题: Template matching processing device and template matching processing program
- 专利标题(中): 模板匹配处理设备和模板匹配处理程序
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申请号: US13696260申请日: 2011-03-17
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公开(公告)号: US08971627B2公开(公告)日: 2015-03-03
- 发明人: Jun'ichi Taguchi , Mitsuji Ikeda , Yuichi Abe , Masahiro Kitazawa , Wataru Nagatomo
- 申请人: Jun'ichi Taguchi , Mitsuji Ikeda , Yuichi Abe , Masahiro Kitazawa , Wataru Nagatomo
- 申请人地址: JP Tokyo
- 专利权人: Hitachi High-Technologies Corporation
- 当前专利权人: Hitachi High-Technologies Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Volpe and Koenig, P.C.
- 优先权: JP2010-106936 20100507
- 国际申请: PCT/JP2011/056444 WO 20110317
- 国际公布: WO2011/138882 WO 20111110
- 主分类号: G06K9/00
- IPC分类号: G06K9/00 ; G06K9/62 ; G01B11/00 ; G01B15/00 ; G06T7/00 ; H01L21/66
摘要:
The present invention is a template matching processing device capable of evaluating a similarity degree which supports even a case of intensive morphological change between a design image and a photographic image. In the template matching processing device, matching processing between the design image and the photographic image is performed, a partial design image is obtained by clipping a portion having the highest correlation (step 101), and processing for deforming the photographic image in accordance with the clipped design image (steps 102 to 105) is performed, so that correlation between the deformed image obtained and the design image is taken to be set as the similarity degree.
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