Invention Grant
- Patent Title: Template matching processing device and template matching processing program
- Patent Title (中): 模板匹配处理设备和模板匹配处理程序
-
Application No.: US13696260Application Date: 2011-03-17
-
Publication No.: US08971627B2Publication Date: 2015-03-03
- Inventor: Jun'ichi Taguchi , Mitsuji Ikeda , Yuichi Abe , Masahiro Kitazawa , Wataru Nagatomo
- Applicant: Jun'ichi Taguchi , Mitsuji Ikeda , Yuichi Abe , Masahiro Kitazawa , Wataru Nagatomo
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Volpe and Koenig, P.C.
- Priority: JP2010-106936 20100507
- International Application: PCT/JP2011/056444 WO 20110317
- International Announcement: WO2011/138882 WO 20111110
- Main IPC: G06K9/00
- IPC: G06K9/00 ; G06K9/62 ; G01B11/00 ; G01B15/00 ; G06T7/00 ; H01L21/66

Abstract:
The present invention is a template matching processing device capable of evaluating a similarity degree which supports even a case of intensive morphological change between a design image and a photographic image. In the template matching processing device, matching processing between the design image and the photographic image is performed, a partial design image is obtained by clipping a portion having the highest correlation (step 101), and processing for deforming the photographic image in accordance with the clipped design image (steps 102 to 105) is performed, so that correlation between the deformed image obtained and the design image is taken to be set as the similarity degree.
Public/Granted literature
- US20130114898A1 TEMPLATE MATCHING PROCESSING DEVICE AND TEMPLATE MATCHING PROCESSING PROGRAM Public/Granted day:2013-05-09
Information query