Invention Grant
- Patent Title: Inertial sensor and method of manufacturing the same
- Patent Title (中): 惯性传感器及其制造方法
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Application No.: US13275397Application Date: 2011-10-18
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Publication No.: US08973438B2Publication Date: 2015-03-10
- Inventor: Jong Woon Kim , Sung Jun Lee , Won Kyu Jeung , Min Kyu Choi , Heung Woo Park
- Applicant: Jong Woon Kim , Sung Jun Lee , Won Kyu Jeung , Min Kyu Choi , Heung Woo Park
- Applicant Address: KR Gyunggi-Do
- Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee Address: KR Gyunggi-Do
- Agency: Ladas & Parry, LLP
- Priority: KR10-2011-0078638 20110808
- Main IPC: G01P1/02
- IPC: G01P1/02 ; G01P15/12 ; G01P15/09 ; G01C19/5769 ; G01C19/5755 ; G01P15/08

Abstract:
Disclosed herein are an inertial sensor and a method of manufacturing the same. The inertial sensor 100 according to a preferred embodiment of the present invention is configured to include a plate-shaped membrane 110, a mass body 120 disposed under a central portion 113 of the membrane 110, a post 130 disposed under an edge 115 of the membrane 110 so as to support the membrane 110, and a bottom cap 150 of which the edge 153 is provided with the first cavity 155 into which an adhesive 140 is introduced, wherein the adhesive 140 bonds an edge 153 to a bottom surface of the post, whereby the edge 153 of the bottom cap 150 is provided with the first cavity 155 to introduce the adhesive 140 into the first cavity 155, thereby preventing the adhesive 140 from being permeated into the post 130.
Public/Granted literature
- US20130036818A1 INERTIAL SENSOR AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2013-02-14
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