Invention Grant
- Patent Title: Methods and apparatus for conserving electronic device manufacturing resources
- Patent Title (中): 节省电子设备制造资源的方法和装置
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Application No.: US12410435Application Date: 2009-03-24
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Publication No.: US08974605B2Publication Date: 2015-03-10
- Inventor: Daniel O. Clark , Phil Chandler , Jay J. Jung
- Applicant: Daniel O. Clark , Phil Chandler , Jay J. Jung
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Dugan & Dugan, PC
- Main IPC: B08B5/00
- IPC: B08B5/00 ; C23C16/44 ; C23C14/56
Abstract:
A method for operating an electronic device manufacturing system is provided, including: introducing an inert gas into a process tool vacuum pump at a first flow rate while the process tool is operating in a process mode; and introducing the inert gas into the process tool vacuum pump at a second flow rate while the process tool is operating in a clean mode. Numerous other embodiments are provided.
Public/Granted literature
- US20090246105A1 METHODS AND APPARATUS FOR CONSERVING ELECTRONIC DEVICE MANUFACTURING RESOURCES Public/Granted day:2009-10-01
Information query
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