发明授权
US08979611B2 Polishing pad, production method for same, and production method for glass substrate 有权
抛光垫,其制造方法以及玻璃基板的制造方法

Polishing pad, production method for same, and production method for glass substrate
摘要:
A polishing pad having a polishing layer comprising a thermoset polyurethane foam, wherein about the thermoset polyurethane foam, the Asker C hardness value thereof is 82 or less as a 60-second value, the hardness value being a value after the foam is immersed in water for 24 hours, and further the value of the tensile storage modulus E′ (30° C.) thereof at a frequency of 1.6 Hz satisfies the following expression (1): Y
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