发明授权
- 专利标题: Polishing pad, production method for same, and production method for glass substrate
- 专利标题(中): 抛光垫,其制造方法以及玻璃基板的制造方法
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申请号: US13696759申请日: 2011-03-22
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公开(公告)号: US08979611B2公开(公告)日: 2015-03-17
- 发明人: Akinori Sato , Nobuyoshi Ishizaka
- 申请人: Akinori Sato , Nobuyoshi Ishizaka
- 申请人地址: JP Osaka
- 专利权人: Toyo Tire & Rubber Co., Ltd.
- 当前专利权人: Toyo Tire & Rubber Co., Ltd.
- 当前专利权人地址: JP Osaka
- 代理机构: Morrison & Foerster LLP
- 优先权: JP2010-108506 20100510
- 国际申请: PCT/JP2011/056704 WO 20110322
- 国际公布: WO2011/142177 WO 20111117
- 主分类号: B24D11/00
- IPC分类号: B24D11/00 ; B24B37/24 ; B24B7/24
摘要:
A polishing pad having a polishing layer comprising a thermoset polyurethane foam, wherein about the thermoset polyurethane foam, the Asker C hardness value thereof is 82 or less as a 60-second value, the hardness value being a value after the foam is immersed in water for 24 hours, and further the value of the tensile storage modulus E′ (30° C.) thereof at a frequency of 1.6 Hz satisfies the following expression (1): Y
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