Invention Grant
US08980669B2 Method and structure for a micro-mechanical device containing liquid thereon
有权
用于在其上容纳液体的微机械装置的方法和结构
- Patent Title: Method and structure for a micro-mechanical device containing liquid thereon
- Patent Title (中): 用于在其上容纳液体的微机械装置的方法和结构
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Application No.: US14078598Application Date: 2013-11-13
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Publication No.: US08980669B2Publication Date: 2015-03-17
- Inventor: Jung-Hsiang Chen , Cheng-Szu Chen , Bo-Ting Chen
- Applicant: Sagatek Co., Ltd.
- Applicant Address: TW Taipei
- Assignee: Sagatek Co., Ltd.
- Current Assignee: Sagatek Co., Ltd.
- Current Assignee Address: TW Taipei
- Agency: Bacon & Thomas, PLLC
- Priority: TW102108095A 20130307
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/30 ; B81C3/00
Abstract:
The present invention discloses an adhesive-free method for preparation of micro electro-mechanical structure, comprising forming a micro electro-mechanical structure on a first substrate, forming an enclosing space for immersing liquid on the first or second substrate, and applying pressure to fix the first and second substrate. Before applying the pressure, the assembly including the two substrates is flipped, to make the contact surface immersed by the immersing liquid.
Public/Granted literature
- US20140256077A1 Method for preparation of micro electro-mechanical structure Public/Granted day:2014-09-11
Information query
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