Multilayered liquid capacitive micro inclinometer
    1.
    发明授权
    Multilayered liquid capacitive micro inclinometer 有权
    多层液体电容式微型倾斜仪

    公开(公告)号:US09086276B2

    公开(公告)日:2015-07-21

    申请号:US14039018

    申请日:2013-09-27

    CPC classification number: G01C9/20

    Abstract: The present invention relates to a liquid multilayer capacitive micro inclinometer, comprising at least two pairs of differential electrodes, each pair positioned in a same plane; at least one common electrode with a portion positioned in the plane of each pair of differential electrodes. The differential electrodes and the common electrode are provided in a sealed chamber, in which an immersing liquid is filled. The shape of the differential electrodes forms a sector of a circular plane. The inclinometer may further integrate a reading circuit. The present invention also discloses preparation method for the invented inclinometer.

    Abstract translation: 本发明涉及一种液体多层电容式微型倾斜仪,其包括至少两对差动电极,每对差示电极对位于同一平面内; 至少一个公共电极,其中一部分位于每对差动电极的平面内。 差分电极和公共电极设置在其中填充浸渍液体的密封室中。 差分电极的形状形成圆形平面的扇形。 倾斜计还可以集成读取电路。 本发明还公开了本发明的倾斜仪的制备方法。

    Liquid capacitive micro inclinometer
    2.
    发明授权
    Liquid capacitive micro inclinometer 有权
    液体电容微倾角仪

    公开(公告)号:US09074885B2

    公开(公告)日:2015-07-07

    申请号:US14038909

    申请日:2013-09-27

    CPC classification number: G01C9/20 G01C25/00 Y10T29/49155

    Abstract: The present invention relates to a liquid capacitive micro inclinometer, comprising a pair of differential electrodes and a common electrode, all formed in the same plane in a sealed chamber. Immersing liquid is filled in the sealed chamber. The shape of the differential electrodes forms a sector of a circular plane. The inclinometer may further integrate a reading circuit. The present invention also discloses preparation method for the invented inclinometer.

    Abstract translation: 液体电容式微型倾斜仪技术领域本发明涉及一种液体电容微型倾斜仪,其包括一对差分电极和公共电极,全部在密封室中形成在同一平面内。 浸入液体被填充在密封室中。 差分电极的形状形成圆形平面的扇形。 倾斜计还可以集成读取电路。 本发明还公开了本发明的倾斜仪的制备方法。

    Method and structure for a micro-mechanical device containing liquid thereon
    3.
    发明授权
    Method and structure for a micro-mechanical device containing liquid thereon 有权
    用于在其上容纳液体的微机械装置的方法和结构

    公开(公告)号:US08980669B2

    公开(公告)日:2015-03-17

    申请号:US14078598

    申请日:2013-11-13

    Abstract: The present invention discloses an adhesive-free method for preparation of micro electro-mechanical structure, comprising forming a micro electro-mechanical structure on a first substrate, forming an enclosing space for immersing liquid on the first or second substrate, and applying pressure to fix the first and second substrate. Before applying the pressure, the assembly including the two substrates is flipped, to make the contact surface immersed by the immersing liquid.

    Abstract translation: 本发明公开了一种用于制备微机电结构的无粘合剂的方法,包括在第一基底上形成微机电结构,形成用于将液体浸渍在第一或第二基底上的封闭空间,并施加压力以固定 第一和第二基板。 在施加压力之前,将包括两个基板的组件翻转,以使接触表面浸入浸渍液体中。

    Liquid Capacitive Micro Inclinometer
    4.
    发明申请
    Liquid Capacitive Micro Inclinometer 有权
    液体电容微倾角仪

    公开(公告)号:US20140082953A1

    公开(公告)日:2014-03-27

    申请号:US14038909

    申请日:2013-09-27

    CPC classification number: G01C9/20 G01C25/00 Y10T29/49155

    Abstract: The present invention relates to a liquid capacitive micro inclinometer, comprising a pair of differential electrodes and a common electrode, all formed in the same plane in a sealed chamber. Immersing liquid is filled in the sealed chamber. The shape of the differential electrodes forms a sector of a circular plane. The inclinometer may further integrate a reading circuit. The present invention also discloses preparation method for the invented inclinometer.

    Abstract translation: 液体电容式微型倾斜仪技术领域本发明涉及一种液体电容微型倾斜仪,其包括一对差分电极和公共电极,全部在密封室中形成在同一平面内。 浸入液体被填充在密封室中。 差分电极的形状形成圆形平面的扇形。 倾斜计还可以集成读取电路。 本发明还公开了本发明的倾斜仪的制备方法。

    Multilayered Liquid Capacitive Micro Inclinometer
    5.
    发明申请
    Multilayered Liquid Capacitive Micro Inclinometer 有权
    多层液体电容式微型倾角仪

    公开(公告)号:US20140082954A1

    公开(公告)日:2014-03-27

    申请号:US14039018

    申请日:2013-09-27

    CPC classification number: G01C9/20

    Abstract: The present invention relates to a liquid multilayer capacitive micro inclinometer, comprising at least two pairs of differential electrodes, each pair positioned in a same plane; at least one common electrode with a portion positioned in the plane of each pair of differential electrodes. The differential electrodes and the common electrode are provided in a sealed chamber, in which an immersing liquid is filled. The shape of the differential electrodes forms a sector of a circular plane. The inclinometer may further integrate a reading circuit. The present invention also discloses preparation method for the invented inclinometer.

    Abstract translation: 本发明涉及一种液体多层电容式微型倾斜仪,其包括至少两对差动电极,每对差示电极对位于同一平面内; 至少一个公共电极,其中一部分位于每对差动电极的平面内。 差分电极和公共电极设置在其中填充浸渍液体的密封室中。 差分电极的形状形成圆形平面的扇形。 倾斜计还可以集成读取电路。 本发明还公开了本发明的倾斜仪的制备方法。

    Method for preparation of micro electro-mechanical structure
    6.
    发明申请
    Method for preparation of micro electro-mechanical structure 有权
    微机电结构的制备方法

    公开(公告)号:US20140256077A1

    公开(公告)日:2014-09-11

    申请号:US14078598

    申请日:2013-11-13

    Abstract: The present invention discloses an adhesive-free method for preparation of micro electro-mechanical structure, comprising forming a micro electro-mechanical structure on a first substrate, forming an enclosing space for immersing liquid on the first or second substrate, and applying pressure to fix the first and second substrate. Before applying the pressure, the assembly including the two substrates is flipped, to make the contact surface immersed by the immersing liquid.

    Abstract translation: 本发明公开了一种用于制备微机电结构的无粘合剂的方法,包括在第一基底上形成微机电结构,形成用于将液体浸渍在第一或第二基底上的封闭空间,并施加压力以固定 第一和第二基板。 在施加压力之前,将包括两个基板的组件翻转,以使接触表面浸入浸渍液体中。

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