Invention Grant
- Patent Title: Complementary back end of line (BEOL) capacitor
- Patent Title (中): 互补后端(BEOL)电容
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Application No.: US13770127Application Date: 2013-02-19
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Publication No.: US08980708B2Publication Date: 2015-03-17
- Inventor: John J. Zhu , Bin Yang , P R Chidambaram , Lixin Ge , Jihong Choi
- Applicant: QUALCOMM Incorporated
- Applicant Address: US CA San Diego
- Assignee: QUALCOMM Incorporated
- Current Assignee: QUALCOMM Incorporated
- Current Assignee Address: US CA San Diego
- Agency: Seyfarth Shaw LLP
- Main IPC: H01L21/8244
- IPC: H01L21/8244 ; H01L23/538 ; H01L27/08 ; H01L49/02 ; H01L23/522

Abstract:
A complementary back end of line (BEOL) capacitor (CBC) structure includes a metal oxide metal (MOM) capacitor structure. The MOM capacitor structure is coupled to a first upper interconnect layer of an interconnect stack of an integrated circuit (IC) device. The MOM capacitor structure includes at least one lower interconnect layer of the interconnect stack. The CBC structure may also include a second upper interconnect layer of the interconnect stack coupled to the MOM capacitor structure. The CBC structure also includes at least one metal insulator metal (MIM) capacitor layer between the first upper interconnect layer and the second upper interconnect layer. In addition, CBC structure may also include a MIM capacitor structure coupled to the MOM capacitor structure. The MIM capacitor structure includes a first capacitor plate having at least a portion of the first upper interconnect layer, and a second capacitor plate having at least a portion of the MIM capacitor layer(s).
Public/Granted literature
- US20140231957A1 COMPLEMENTARY BACK END OF LINE (BEOL) CAPACITOR Public/Granted day:2014-08-21
Information query
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