Invention Grant
US08981560B2 Method and structure of sensors and MEMS devices using vertical mounting with interconnections 有权
使用垂直安装与互连的传感器和MEMS器件的方法和结构

Method and structure of sensors and MEMS devices using vertical mounting with interconnections
Abstract:
A method and structure for fabricating sensor(s) or electronic device(s) using vertical mounting with interconnections. The method includes providing a resulting device including at least one sensor or electronic device, formed on a die member, having contact region(s) with one or more conductive materials formed thereon. The resulting device can then be singulated within a vicinity of the contact region(s) to form one or more singulated dies, each having a singulated surface region. The singulated die(s) can be coupled to a substrate member, having a first surface region, such that the singulated surface region(s) of the singulated die(s) are coupled to a portion of the first surface region. Interconnections can be formed between the die(s) and the substrate member with conductive adhesives, solder processes, or other conductive bonding processes.
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