Invention Grant
US08981560B2 Method and structure of sensors and MEMS devices using vertical mounting with interconnections
有权
使用垂直安装与互连的传感器和MEMS器件的方法和结构
- Patent Title: Method and structure of sensors and MEMS devices using vertical mounting with interconnections
- Patent Title (中): 使用垂直安装与互连的传感器和MEMS器件的方法和结构
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Application No.: US13923011Application Date: 2013-06-20
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Publication No.: US08981560B2Publication Date: 2015-03-17
- Inventor: Dave Paul Jensen , Hong Wan , Jon Ewanich
- Applicant: mCube, Inc.
- Applicant Address: US CA San Jose
- Assignee: mCube Inc.
- Current Assignee: mCube Inc.
- Current Assignee Address: US CA San Jose
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L23/52 ; H01L29/40 ; H01L23/00 ; B81B3/00

Abstract:
A method and structure for fabricating sensor(s) or electronic device(s) using vertical mounting with interconnections. The method includes providing a resulting device including at least one sensor or electronic device, formed on a die member, having contact region(s) with one or more conductive materials formed thereon. The resulting device can then be singulated within a vicinity of the contact region(s) to form one or more singulated dies, each having a singulated surface region. The singulated die(s) can be coupled to a substrate member, having a first surface region, such that the singulated surface region(s) of the singulated die(s) are coupled to a portion of the first surface region. Interconnections can be formed between the die(s) and the substrate member with conductive adhesives, solder processes, or other conductive bonding processes.
Public/Granted literature
- US20130277836A1 METHOD AND STRUCTURE OF SENSORS AND MEMS DEVICES USING VERTICAL MOUNTING WITH INTERCONNECTIONS Public/Granted day:2013-10-24
Information query
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