Invention Grant
US08986523B2 Biosensor capacitor 有权
生物传感器电容器

Biosensor capacitor
Abstract:
A biosensor capacitor, including a dielectric layer; a first metal layer in the dielectric layer; a passivation layer over the dielectric layer and the first metal layer; an isolation layer over the passivation layer; a probe DNA electrode connected to the first metal layer; a counter electrode connected to the first metal layer wherein the counter electrode forms an enclosure around the probe DNA electrode; and a bond pad connected to the first metal layer.
Public/Granted literature
Information query
Patent Agency Ranking
0/0