Invention Grant
- Patent Title: Biosensor capacitor
- Patent Title (中): 生物传感器电容器
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Application No.: US13353523Application Date: 2012-01-19
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Publication No.: US08986523B2Publication Date: 2015-03-24
- Inventor: Kristin M. Ackerson , John J. Ellis-Monaghan , Jeffrey P. Gambino , Yen Li Lim , Polina A. Razina
- Applicant: Kristin M. Ackerson , John J. Ellis-Monaghan , Jeffrey P. Gambino , Yen Li Lim , Polina A. Razina
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Hoffman Warnick LLC
- Agent Michael J. LeStrange
- Main IPC: G01N27/327
- IPC: G01N27/327 ; G01R27/26 ; G01N27/22 ; H01L23/00 ; H01L23/522

Abstract:
A biosensor capacitor, including a dielectric layer; a first metal layer in the dielectric layer; a passivation layer over the dielectric layer and the first metal layer; an isolation layer over the passivation layer; a probe DNA electrode connected to the first metal layer; a counter electrode connected to the first metal layer wherein the counter electrode forms an enclosure around the probe DNA electrode; and a bond pad connected to the first metal layer.
Public/Granted literature
- US20130186754A1 BIOSENSOR CAPACITOR Public/Granted day:2013-07-25
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