Invention Grant
- Patent Title: Imprinting device, method of fabricating the same, and method of patterning thin film using the same
- Patent Title (中): 印刷装置及其制造方法以及使用其形成薄膜的方法
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Application No.: US12030959Application Date: 2008-02-14
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Publication No.: US08986909B2Publication Date: 2015-03-24
- Inventor: Jung-Mok Bae
- Applicant: Jung-Mok Bae
- Applicant Address: KR
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR
- Agency: Cantor Colburn LLP
- Priority: KR10-2007-0055108 20070605
- Main IPC: G03H1/04
- IPC: G03H1/04 ; G03F7/00 ; B82Y10/00 ; B82Y40/00

Abstract:
An imprinting device includes a first substrate, a light blocking layer formed on the first substrate corresponding to a light blocking area, and a patterned layer formed on the first substrate. The patterned layer includes an etch pattern and a flow control pattern formed on the first substrate corresponding to a transmittance area and the light blocking area, respectively. When the patterned layer presses a resin layer, the resin layer pressed by the etch pattern moves towards the flow control pattern or a photosensitive resin layer pressed by the flow control pattern moves towards the etch pattern according to a shape of the flow control pattern. Thus, when the shape of the flow control pattern is controlled, the resin layer pressed by the patterned layer may be formed with a uniform thickness.
Public/Granted literature
- US20080305410A1 IMPRINTING DEVICE, METHOD OF FABRICATING THE SAME. AND METHOD OF PATTERNING THIN FILM USING THE SAME Public/Granted day:2008-12-11
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