Invention Grant
US08986909B2 Imprinting device, method of fabricating the same, and method of patterning thin film using the same 有权
印刷装置及其制造方法以及使用其形成薄膜的方法

Imprinting device, method of fabricating the same, and method of patterning thin film using the same
Abstract:
An imprinting device includes a first substrate, a light blocking layer formed on the first substrate corresponding to a light blocking area, and a patterned layer formed on the first substrate. The patterned layer includes an etch pattern and a flow control pattern formed on the first substrate corresponding to a transmittance area and the light blocking area, respectively. When the patterned layer presses a resin layer, the resin layer pressed by the etch pattern moves towards the flow control pattern or a photosensitive resin layer pressed by the flow control pattern moves towards the etch pattern according to a shape of the flow control pattern. Thus, when the shape of the flow control pattern is controlled, the resin layer pressed by the patterned layer may be formed with a uniform thickness.
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