Invention Grant
US08987067B2 Segmented guard ring structures with electrically insulated gap structures and design structures thereof 有权
具有电绝缘间隙结构及其设计结构的分段保护环结构

Segmented guard ring structures with electrically insulated gap structures and design structures thereof
Abstract:
Disclosed are guard ring structures with an electrically insulated gap in a substrate to reduce or eliminate device coupling of integrated circuit chips, methods of manufacture and design structures. The method includes forming a guard ring structure comprising a plurality of metal layers within dielectric layers. The method further includes forming diffusion regions to electrically insulate a gap in a substrate formed by segmented portions of the guard ring structure.
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