Invention Grant
- Patent Title: Segmented guard ring structures with electrically insulated gap structures and design structures thereof
- Patent Title (中): 具有电绝缘间隙结构及其设计结构的分段保护环结构
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Application No.: US13782537Application Date: 2013-03-01
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Publication No.: US08987067B2Publication Date: 2015-03-24
- Inventor: Robert L. Barry , Phillip F. Chapman , Jeffrey P. Gambino , Michael L. Gautsch , Mark D. Jaffe , Kevin N. Ogg , Bradley A. Orner
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran
- Agent Anthony Canale
- Main IPC: H01L21/332
- IPC: H01L21/332 ; H01L21/762 ; H01L23/31

Abstract:
Disclosed are guard ring structures with an electrically insulated gap in a substrate to reduce or eliminate device coupling of integrated circuit chips, methods of manufacture and design structures. The method includes forming a guard ring structure comprising a plurality of metal layers within dielectric layers. The method further includes forming diffusion regions to electrically insulate a gap in a substrate formed by segmented portions of the guard ring structure.
Public/Granted literature
- US20140246752A1 SEGMENTED GUARD RING STRUCTURES WITH ELECTRICALLY INSULATED GAP STRUCTURES AND DESIGN STRUCTURES THEREOF Public/Granted day:2014-09-04
Information query
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