Invention Grant
US08987156B2 Polycrystalline group III metal nitride with getter and method of making
有权
具有吸气剂的多晶III族金属氮化物及其制备方法
- Patent Title: Polycrystalline group III metal nitride with getter and method of making
- Patent Title (中): 具有吸气剂的多晶III族金属氮化物及其制备方法
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Application No.: US13894220Application Date: 2013-05-14
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Publication No.: US08987156B2Publication Date: 2015-03-24
- Inventor: Mark P. D'Evelyn , Derrick S. Kamber
- Applicant: Soraa, Inc.
- Applicant Address: US CA Fremont
- Assignee: Soraa, Inc.
- Current Assignee: Soraa, Inc.
- Current Assignee Address: US CA Fremont
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: C04B35/00
- IPC: C04B35/00 ; C01B21/06 ; C30B9/00 ; C30B28/06 ; C30B29/40 ; C30B7/10
Abstract:
A gettered polycrystalline group III metal nitride is formed by heating a group III metal with an added getter in a nitrogen-containing gas. Most of the residual oxygen in the gettered polycrystalline nitride is chemically bound by the getter. The gettered polycrystalline group III metal nitride is useful as a raw material for ammonothermal growth of bulk group III nitride crystals.
Public/Granted literature
- US20130251615A1 POLYCRYSTALLINE GROUP III METAL NITRIDE WITH GETTER AND METHOD OF MAKING Public/Granted day:2013-09-26
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