Invention Grant
US08987783B2 Semiconductor heterostructure and transistor of HEMT type, in particular for low-frequency low-noise cryogenic applications
有权
半导体异质结构和HEMT型晶体管,特别适用于低频低噪声低温应用
- Patent Title: Semiconductor heterostructure and transistor of HEMT type, in particular for low-frequency low-noise cryogenic applications
- Patent Title (中): 半导体异质结构和HEMT型晶体管,特别适用于低频低噪声低温应用
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Application No.: US13878948Application Date: 2011-10-07
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Publication No.: US08987783B2Publication Date: 2015-03-24
- Inventor: Yong Jin , Ulf Gennser , Antonella Cavanna
- Applicant: Yong Jin , Ulf Gennser , Antonella Cavanna
- Applicant Address: FR Paris
- Assignee: Centre National de la Recherch Scientifique
- Current Assignee: Centre National de la Recherch Scientifique
- Current Assignee Address: FR Paris
- Agency: Alston & Bird LLP
- Priority: FR1004012 20101011
- International Application: PCT/IB2011/054432 WO 20111007
- International Announcement: WO2012/049603 WO 20120419
- Main IPC: H01L31/072
- IPC: H01L31/072 ; H01L29/20 ; H01L29/778

Abstract:
A semiconductor heterostructure having: a substrate (SS); a buffer layer (h); a spacer layer (d, e, f); a barrier layer (b, c); and which may also include a cover layer (a) is provided. The barrier layer is doped (DS); and the barrier and spacer layers are made of one or more semiconductors having wider bandgaps than the one or more materials forming the buffer layer, the heterostructure being characterized in that: the barrier layer comprises a first barrier sublayer (c) in contact with the spacer layer, and a second barrier sublayer (b), distant from the spacer layer; and in that the second barrier sublayer has a wider bandgap than the first barrier sublayer. The invention also relates to a HEMT transistor produced using such a heterostructure and to the use of such a transistor at cryogenic temperatures.
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