Invention Grant
- Patent Title: Radio-frequency device package and method for fabricating the same
- Patent Title (中): 射频装置封装及其制造方法
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Application No.: US13790060Application Date: 2013-03-08
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Publication No.: US08987851B2Publication Date: 2015-03-24
- Inventor: Ming-Tzong Yang , Cheng-Chou Hung , Tung-Hsing Lee , Wei-Che Huang , Yu-Hua Huang
- Applicant: MediaTek Inc.
- Applicant Address: TW Hsin-Chu
- Assignee: MediaTek Inc.
- Current Assignee: MediaTek Inc.
- Current Assignee Address: TW Hsin-Chu
- Agency: McClure, Qualey & Rodack, LLP
- Main IPC: H01L27/14
- IPC: H01L27/14 ; H01L29/40 ; H01L21/76 ; H01L23/522 ; H01L31/18 ; H01L23/48 ; H01L23/00

Abstract:
The invention provides a radio-frequency (RF) device package and a method for fabricating the same. An exemplary embodiment of a radio-frequency (RF) device package includes a base, wherein a radio-frequency (RF) device chip is mounted on the base. The RF device chip includes a semiconductor substrate having a front side and a back side. A radio-frequency (RF) component is disposed on the front side of the semiconductor substrate. An interconnect structure is disposed on the RF component, wherein the interconnect structure is electrically connected to the RF component, and a thickness of the semiconductor substrate is less than that of the interconnect structure. A through hole is formed through the semiconductor substrate from the back side of the semiconductor substrate, and is connected to the interconnect structure. A TSV structure is disposed in the through hole.
Public/Granted literature
- US20140070346A1 RADIO-FREQUENCY DEVICE PACKAGE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2014-03-13
Information query
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