Invention Grant
US08987982B2 Method of producing rapid heating of a cathode installed in a thermionic emission assembly
有权
制造安装在热电子发射组件中的阴极的快速加热的方法
- Patent Title: Method of producing rapid heating of a cathode installed in a thermionic emission assembly
- Patent Title (中): 制造安装在热电子发射组件中的阴极的快速加热的方法
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Application No.: US14077051Application Date: 2013-11-11
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Publication No.: US08987982B2Publication Date: 2015-03-24
- Inventor: Gerald Magera , William Mackie , Larry Southall , Gary Cabe , Cory Fast
- Applicant: Applied Physics Technologies, Inc.
- Applicant Address: US OR McMinnville
- Assignee: Applied Physics Technologies, Inc.
- Current Assignee: Applied Physics Technologies, Inc.
- Current Assignee Address: US OR McMinnville
- Agency: Stoel Rives LLP
- Main IPC: H01J9/02
- IPC: H01J9/02 ; H01J9/04 ; H01J37/065

Abstract:
A thermionic emission assembly includes a Wehnelt cap that has a cap beam aperture and a cavity within which a cathode is supported. Electrical energy applied to the cathode causes it to reach a sufficiently high temperature to emit a beam of electrons that propagate through the cap beam aperture. An anode having an anode beam aperture is positioned in spatial alignment with the cap beam aperture to receive the electrons. The anode accelerates the electrons and directs them through the anode beam aperture for incidence on a target specimen. A ceramic base forms a combined interface that electrically and thermally separates the Wehnelt cap and the anode. The thermal isolation of the Wehnelt cap from the anode allows the Wehnelt cap to increase in heat to rapidly reach a stable temperature as the cathode emits the beam of electrons.
Public/Granted literature
- US20140065918A1 METHOD OF PRODUCING RAPID HEATING OF A CATHODE INSTALLED IN A THERMIONIC EMISSION ASSEMBLY Public/Granted day:2014-03-06
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