公开(公告)号：US20140065918A1

公开(公告)日：2014-03-06

申请号：US14077051

申请日：2013-11-11

Applicant: Applied Physics Technologies, Inc.

Inventor： Gerald Magera ,  William Mackie ,  Larry Southall ,  Gary Cabe ,  Cory Fast

IPC: H01J9/04

CPC classification number: H01J9/045 ,  H01J37/065 ,  H01J2237/06308

Abstract: A thermionic emission assembly includes a Wehnelt cap that has a cap beam aperture and a cavity within which a cathode is supported. Electrical energy applied to the cathode causes it to reach a sufficiently high temperature to emit a beam of electrons that propagate through the cap beam aperture. An anode having an anode beam aperture is positioned in spatial alignment with the cap beam aperture to receive the electrons. The anode accelerates the electrons and directs them through the anode beam aperture for incidence on a target specimen. A ceramic base forms a combined interface that electrically and thermally separates the Wehnelt cap and the anode. The thermal isolation of the Wehnelt cap from the anode allows the Wehnelt cap to increase in heat to rapidly reach a stable temperature as the cathode emits the beam of electrons.

Abstract translation: 热电子发射组件包括具有帽束孔的Wehnelt帽和其中负载阴极的空腔。 施加到阴极的电能使得其达到足够高的温度以发射通过帽光束孔径传播的电子束。 具有阳极光束孔的阳极定位成与帽光束孔径空间对准以接收电子。 阳极加速电子并引导它们穿过阳极光束孔径以入射到目标样品上。 陶瓷底座形成了一个组合的界面，它将Wehnelt帽和阳极电和热分离开。 Wehnelt帽与阳极的热隔离允许Wehnelt帽随着阴极发射电子束而增加热量以迅速达到稳定的温度。

公开(公告)号：US11948769B2

公开(公告)日：2024-04-02

申请号：US18261645

申请日：2023-01-12

Applicant: Applied Physics Technologies, Inc.

Inventor： Gerald G. Magera ,  Aaron M. Torok ,  Joel A. Wenrich ,  Matthew C. Zappe

IPC: H01J1/16 ,  H01J9/04 ,  H05B3/14

CPC classification number: H01J1/16 ,  H01J9/042 ,  H05B3/145

Abstract: A monolithic graphite heater for heating a thermionic electron cathode includes first and second electrically conductive arms, each one of the first and second electrically conductive arms having an electrode mount at a proximal end, a thermal apex at a distal end, and a transitional region between the electrode mount and the thermal apex; a cathode mount electrically and mechanically coupling each thermal apex to form a maximum Joule-heating region at or adjacent the cathode mount and decreasing Joule heating along each transitional region; and a press-fit aperture formed in the cathode mount, the press-fit aperture sized to receive at least a portion of the thermionic electron cathode for facilitating thermionic emission produced therefrom in response to operative heat power generation provided by the maximum Joule-heating region.

公开(公告)号：US20240055213A1

公开(公告)日：2024-02-15

申请号：US18261645

申请日：2023-01-12

Applicant: Applied Physics Technologies, Inc.

Inventor： Gerald G. MAGERA ,  Aaron M. TOROK ,  Joel A. WENRICH ,  Matthew C. ZAPPE

IPC: H01J1/16 ,  H05B3/14 ,  H01J9/04

CPC classification number: H01J1/16 ,  H05B3/145 ,  H01J9/042

Abstract: A monolithic graphite heater for heating a thermionic electron cathode includes first and second electrically conductive arms, each one of the first and second electrically conductive arms having an electrode mount at a proximal end, a thermal apex at a distal end, and a transitional region between the electrode mount and the thermal apex; a cathode mount electrically and mechanically coupling each thermal apex to form a maximum Joule-heating region at or adjacent the cathode mount and decreasing Joule heating along each transitional region; and a press-fit aperture formed in the cathode mount, the press-fit aperture sized to receive at least a portion of the thermionic electron cathode for facilitating thermionic emission produced therefrom in response to operative heat power generation provided by the maximum Joule-heating region.

公开(公告)号：US08987982B2

公开(公告)日：2015-03-24

申请号：US14077051

申请日：2013-11-11

Applicant: Applied Physics Technologies, Inc.

Inventor： Gerald Magera ,  William Mackie ,  Larry Southall ,  Gary Cabe ,  Cory Fast

IPC: H01J9/02 ,  H01J9/04 ,  H01J37/065

CPC classification number: H01J9/045 ,  H01J37/065 ,  H01J2237/06308

Abstract: A thermionic emission assembly includes a Wehnelt cap that has a cap beam aperture and a cavity within which a cathode is supported. Electrical energy applied to the cathode causes it to reach a sufficiently high temperature to emit a beam of electrons that propagate through the cap beam aperture. An anode having an anode beam aperture is positioned in spatial alignment with the cap beam aperture to receive the electrons. The anode accelerates the electrons and directs them through the anode beam aperture for incidence on a target specimen. A ceramic base forms a combined interface that electrically and thermally separates the Wehnelt cap and the anode. The thermal isolation of the Wehnelt cap from the anode allows the Wehnelt cap to increase in heat to rapidly reach a stable temperature as the cathode emits the beam of electrons.

Abstract translation: 热电子发射组件包括具有帽束孔的Wehnelt帽和其中负载阴极的空腔。 施加到阴极的电能使得其达到足够高的温度以发射通过帽光束孔径传播的电子束。 具有阳极光束孔的阳极定位成与帽光束孔径空间对准以接收电子。 阳极加速电子并引导它们穿过阳极光束孔径以入射到目标样品上。 陶瓷底座形成了一个组合的界面，它将Wehnelt帽和阳极电和热分离开。 Wehnelt帽与阳极的热隔离允许Wehnelt帽随着阴极发射电子束而增加热量以迅速达到稳定的温度。

公开(公告)号：US09490098B1

公开(公告)日：2016-11-08

申请号：US14992870

申请日：2016-01-11

Applicant: Applied Physics Technologies, Inc.

Inventor： William A. Mackie ,  Gerald G. Magera

IPC: H01J1/146 ,  H01J1/148 ,  H01J19/10 ,  H01J1/14

CPC classification number: H01J1/148 ,  H01J1/14 ,  H01J1/146 ,  H01J19/10 ,  H01J37/06 ,  H01J2201/196 ,  H01J2201/2889 ,  H01J2201/30484 ,  H01J2201/317 ,  H01J2237/06316

Abstract: An electron source is made from mixed-metal carbide materials of high refractory nature. Producing field-enhanced thermionic emission, i.e., thermal-field or extended Schottky emission, from these materials entails the use of a certain low work function crystallographic direction, such as, for example, (100), (210), and (310). These materials do not naturally facet because of their refractory nature. The disclosed electron source made from transition metal carbide material is especially useful when installed in a scanning electron microscope (SEM) performing advanced imaging applications that require a high brightness, high beam current source.

Abstract translation: 电子源由具有高耐火性质的混合金属碳化物材料制成。 从这些材料产生场强增强的热离子发射，即热场或延伸的肖特基发射需要使用某种低功函数的晶体学方向，例如（100），（210）和（310） 。 这些材料由于其耐火性质而不自然而然。 所披露的由过渡金属碳化物材料制成的电子源在安装在需要高亮度，远光束电流源的先进成像应用的扫描电子显微镜（SEM）中是特别有用的。

公开(公告)号：US12237138B2

公开(公告)日：2025-02-25

申请号：US18596561

申请日：2024-03-05

Applicant: Applied Physics Technologies, Inc.

Inventor： Gerald G. Magera ,  Aaron M. Torok ,  Joel A. Wenrich ,  Matthew C. Zappe

IPC: H01J1/16 ,  H01J9/04 ,  H05B3/14

Abstract: A monolithic graphite heater for heating a thermionic electron cathode includes first and second electrically conductive arms, each one of the first and second electrically conductive arms having an electrode mount at a proximal end, a thermal apex at a distal end, and a transitional region between the electrode mount and the thermal apex; a cathode mount electrically and mechanically coupling each thermal apex to form a maximum Joule-heating region at or adjacent the cathode mount and decreasing Joule-heating along each transitional region; and a press-fit aperture formed in the cathode mount, the press-fit aperture sized to receive at least a portion of the thermionic electron cathode for facilitating thermionic emission produced therefrom in response to operative heat power generation provided by the maximum Joule-heating region.

公开(公告)号：US20240212964A1

公开(公告)日：2024-06-27

申请号：US18596561

申请日：2024-03-05

Applicant: Applied Physics Technologies, Inc.

Inventor： Gerald G. MAGERA ,  Aaron M. TOROK ,  Joel A. WENRICH ,  Matthew C. ZAPPE

IPC: H01J1/16 ,  H01J9/04 ,  H05B3/14

CPC classification number: H01J1/16 ,  H01J9/042 ,  H05B3/145

Abstract: A monolithic graphite heater for heating a thermionic electron cathode includes first and second electrically conductive arms, each one of the first and second electrically conductive arms having an electrode mount at a proximal end, a thermal apex at a distal end, and a transitional region between the electrode mount and the thermal apex; a cathode mount electrically and mechanically coupling each thermal apex to form a maximum Joule-heating region at or adjacent the cathode mount and decreasing Joule-heating along each transitional region; and a press-fit aperture formed in the cathode mount, the press-fit aperture sized to receive at least a portion of the thermionic electron cathode for facilitating thermionic emission produced therefrom in response to operative heat power generation provided by the maximum Joule-heating region.

公开(公告)号：US10083812B1

公开(公告)日：2018-09-25

申请号：US15359436

申请日：2016-11-22

Applicant: Applied Physics Technologies, Inc.

Inventor： William A. Mackie ,  Gerald G. Magera ,  Joshua M. Lovell

IPC: H01J1/304 ,  H01J9/02

CPC classification number: H01J1/3044 ,  H01J9/025 ,  H01J2201/30407 ,  H01J2201/30484 ,  H01J2209/0223

Abstract: An electron source emitter is made from transition metal carbide materials, including hafnium carbide (HfC), zirconium carbide (ZrC), titanium carbide (TiC), vanadium carbide (VC), niobium carbide (NbC), and tantalum carbide (TaC), which are of high refractory nature. Preferential evaporating and subsequent development of different crystallographic planes of the transition metal carbide emitter having initially at its apex a small radius (50 nm-300 nm) develop over time an on-axis, sharp end-form or tip that is uniformly accentuated circumferentially to an extreme angular form and persists over time. An emitter manufactured to the (110) crystallographic plane and operating at high electron beam current and high temperature for about 20 hours to 40 hours results in the (110) plane, while initially not a high emission crystallographic orientation, developing into a very high field emission orientation because of the geometrical change. This geometrical change allows for a very high electric field and hence high on-axis electron emission.

公开(公告)号：US09240301B1

公开(公告)日：2016-01-19

申请号：US13851732

申请日：2013-03-27

Applicant: Applied Physics Technologies, Inc.

Inventor： William A. Mackie ,  Gerald G. Magera

IPC: H01J1/14 ,  H01J1/146 ,  H01J19/10 ,  H01J1/148

CPC classification number: H01J1/148 ,  H01J1/14 ,  H01J1/146 ,  H01J19/10 ,  H01J37/06 ,  H01J2201/196 ,  H01J2201/2889 ,  H01J2201/30484 ,  H01J2201/317 ,  H01J2237/06316

Abstract: An electron source is made from mixed-metal carbide materials of high refractory nature. Producing field-enhanced thermionic emission, i.e., thermal-field or extended Schottky emission, from these materials entails the use of a certain low work function crystallographic direction, such as, for example, (100), (210), and (310). These materials do not naturally facet because of their refractory nature. The disclosed electron source made from transition metal carbide material is especially useful when installed in a scanning electron microscope (SEM) performing advanced imaging applications that require a high brightness, high beam current source.

Abstract translation: 电子源由具有高耐火性质的混合金属碳化物材料制成。 从这些材料产生场强增强的热离子发射，即热场或延伸的肖特基发射需要使用某种低功函数的晶体学方向，例如（100），（210）和（310） 。 这些材料由于其耐火性质而不自然而然。 所披露的由过渡金属碳化物材料制成的电子源在安装在需要高亮度，远光束电流源的先进成像应用的扫描电子显微镜（SEM）中是特别有用的。