Invention Grant
US08989888B2 Automatic fault detection and classification in a plasma processing system and methods thereof
有权
等离子体处理系统中的自动故障检测和分类及其方法
- Patent Title: Automatic fault detection and classification in a plasma processing system and methods thereof
- Patent Title (中): 等离子体处理系统中的自动故障检测和分类及其方法
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Application No.: US13381643Application Date: 2010-06-29
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Publication No.: US08989888B2Publication Date: 2015-03-24
- Inventor: Gunsu Yun , Vijayakumar C. Venugopal
- Applicant: Gunsu Yun , Vijayakumar C. Venugopal
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- International Application: PCT/US2010/040452 WO 20100629
- International Announcement: WO2011/002798 WO 20110106
- Main IPC: G06F19/00
- IPC: G06F19/00 ; H01L21/00 ; H01L21/322 ; H01L21/42 ; H01L21/469 ; G01R31/00 ; H01J37/32 ; G06F17/00

Abstract:
A method for automatically detecting fault conditions and classifying the fault conditions during substrate processing is provided. The method includes collecting processing data by a set of sensors during the substrate processing. The method also includes sending the processing data to a fault detection/classification component. The method further includes performing data manipulation of the processing data by the fault detection/classification component. The method yet also includes executing a comparison between the processing data and a plurality of fault models stored within a fault library. Each fault model of the plurality of fault models represents a set of data characterizing a specific fault condition. Each fault model includes at least a fault signature, a fault boundary, and a set of principal component analysis (PCA) parameters.
Public/Granted literature
- US20120101622A1 AUTOMATIC FAULT DETECTION AND CLASSIFICATION IN A PLASMA PROCESSING SYSTEM AND METHODS THEREOF Public/Granted day:2012-04-26
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