发明授权
- 专利标题: Transfer robot
- 专利标题(中): 传送机器人
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申请号: US13666906申请日: 2012-11-01
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公开(公告)号: US08992160B2公开(公告)日: 2015-03-31
- 发明人: Masatoshi Furuichi
- 申请人: Kabushiki Kaisha Yaskawa Denki
- 申请人地址: JP Kitakyushu-Shi
- 专利权人: Kabushiki Kaisha Yaskawa Denki
- 当前专利权人: Kabushiki Kaisha Yaskawa Denki
- 当前专利权人地址: JP Kitakyushu-Shi
- 代理机构: Mori & Ward, LLP
- 优先权: JP2012-018980 20120131
- 主分类号: B25J21/00
- IPC分类号: B25J21/00 ; H01L21/677
摘要:
A transfer robot according to an embodiment includes an arm and a body. The arm is provided, at a terminal end thereof, with a robot hand transferring a thin plate-like workpiece, and operates in horizontal directions. The body includes a lifting and lowering mechanism that lifts and lowers the arm. In the transfer robot, at least a part of the body is disposed outside a side wall of a transfer room that is connected to an opening and closing device opening and closing a storage container for the thin plate-like workpiece and to a processing room processing the thin plate-like workpiece.
公开/授权文献
- US20130195598A1 TRANSFER ROBOT 公开/授权日:2013-08-01
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