Vacuum transfer device and substrate processing system

    公开(公告)号:US11602856B2

    公开(公告)日:2023-03-14

    申请号:US17371901

    申请日:2021-07-09

    摘要: A vacuum transfer device includes: a main body including an arm unit with an internal mechanical part therein and a vacuum seal, and configured to transfer a high temperature substrate in a vacuum; a substrate holder connected to the main body to hold the substrate; a heat transport member provided on a surface of the main body and made of a material having a higher thermal conductivity than that of a material constituting the main body in a creeping direction to transport heat transferred from the substrate to the substrate holder; and a heat radiator configured to dissipate heat transported by the heat transport member.

    Robot system
    10.
    发明授权

    公开(公告)号:US11345034B2

    公开(公告)日:2022-05-31

    申请号:US16801577

    申请日:2020-02-26

    发明人: Yoshihito Yamada

    摘要: A controller of a robot includes a first coupling section coupled to an object detecting device configured to detect an object. The controller is configured to control the robot in one of a first mode in which displacement speed of the robot does not exceed first speed and a second mode in which the displacement speed is second speed higher than the first speed, when the object detecting device is coupled to the first coupling section, switch the first mode and the second mode based on an output from the object detecting device, and control the robot in the first mode when the object detecting device is not coupled to the first coupling section.