Invention Grant
- Patent Title: Slurry supply system for CMP process
- Patent Title (中): 用于CMP工艺的浆料供应系统
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Application No.: US13308706Application Date: 2011-12-01
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Publication No.: US08992287B2Publication Date: 2015-03-31
- Inventor: Sheng-Chen Wang , Feng-Inn Wu , Chih-Hung Tsai , Huang-Jen Hsu , Te-Chia Hsu
- Applicant: Sheng-Chen Wang , Feng-Inn Wu , Chih-Hung Tsai , Huang-Jen Hsu , Te-Chia Hsu
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Associates, LLC
- Main IPC: B24B57/02
- IPC: B24B57/02 ; B24C7/00

Abstract:
The present disclosure relates to a slurry distribution system having a distribution tube connected between a mixing tank and a CMP tool. The mixing tank is configured to generate a polishing mixture comprising a diluted slurry having abrasive particles that enable mechanical polishing of a workpiece. The polishing mixture is transported between the mixing tank and a CMP tool by way of a transport piping. An energy source, in communication with the transport piping, transfers energy to the abrasive particles within the polishing mixture, thereby preventing accumulation of the abrasive particles within the transport piping.
Public/Granted literature
- US20130143474A1 Slurry Sluppy System for CMP Process Public/Granted day:2013-06-06
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