发明授权
- 专利标题: Evaluation of etching conditions for pattern-forming film
- 专利标题(中): 图案形成膜的蚀刻条件的评价
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申请号: US13678714申请日: 2012-11-16
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公开(公告)号: US08992788B2公开(公告)日: 2015-03-31
- 发明人: Shinichi Igarashi , Hiroki Yoshikawa , Yukio Inazuki , Hideo Kaneko
- 申请人: Shin-Etsu Chemical Co., Ltd.
- 申请人地址: JP Tokyo
- 专利权人: Shin-Etsu Chemical Co., Ltd.
- 当前专利权人: Shin-Etsu Chemical Co., Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Birch, Stewart, Kolasch & Birch, LLP
- 优先权: JP2011-252970 20111118
- 主分类号: C03C15/00
- IPC分类号: C03C15/00 ; G06F19/00 ; G03F1/26 ; G03F1/80 ; G03F1/00
摘要:
In conjunction with a photomask blank comprising a transparent substrate, a pattern-forming film, and an etch mask film, a set of etching conditions for the pattern-forming film is evaluated by measuring a first etching clear time (C1) taken when the etch mask film is etched under the etching conditions to be applied to the pattern-forming film, measuring a second etching clear time (C2) taken when the pattern-forming film is etched under the etching conditions, and computing a ratio (C1/C2) of the first to second etching clear time.
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