发明授权
US08993044B2 Methods of forming capacitors having dielectric regions that include multiple metal oxide-comprising materials 有权
形成具有包括多个含金属氧化物的材料的电介质区域的电容器的方法

Methods of forming capacitors having dielectric regions that include multiple metal oxide-comprising materials
摘要:
Capacitors and methods of forming capacitors are disclosed, and which include an inner conductive metal capacitor electrode and an outer conductive metal capacitor electrode. A capacitor dielectric region is received between the inner and the outer conductive metal capacitor electrodes and has a thickness no greater than 150 Angstroms. Various combinations of materials of thicknesses and relationships relative one another are disclosed which enables and results in the dielectric region having a dielectric constant k of at least 35 yet leakage current no greater than 1×10−7 amps/cm2 at from −1.1V to +1.1V.
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